Hiwin Dual Axis Customization - DLJ

Hiwin Dual Axis Customization - DLJ : The semiconductor wafer inspection equipment, AOI equipment.

Stage Dual Axis Customization - DLJ

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Feature | Stage Dual Axis Customization - DLJ

• Intrgration of high-precision torque motor.
• XY positioning with high precision angular compensation.
• Low center of gravity design.
• With short setting time.
• Excellent servo stability.
• Use low dust flat cable (class 1).
• Can be equipment with ironless or ironcore motor.

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Dimensions | Stage Dual Axis Customization - DLJ

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Specifications | Dual Axis Customization - DLJ

Stage type	LMX2C-SA11LAS21L-420-490+TMF42
Motor Type	Ironcore(/Ironless) motor
Stroke(mm)	X-axis : 420, Y-axis : 490
Peak Force(N) / Continuous Force(N)	X-axis : 254/90, Y-axis : 462/149
Repeatability(µm)	±0.5 (with HIWIN solution)
Accuracy(µm)	±2 (after error mapping)
Max. Acceleration(m/s2)	6.5(with payload)
Max. Velocity(m/s)	0.5(with payload)
Vertical Straightness(µm)	±10
Orthogonality(arc-sec)	±5
Payload(kg)	10
Stage orientation	Horizontal
Torque Motor Type	TMF42
Peak Torque(Nm) / Cotinuous Torque(Nm)	3.6/1.2
Max. Velocity(rpm)	120(220V)
Repeatability(arc-sec)	±2.5
Accuracy(are-sec)	±25
Inertia of rotation parts(kgm2)	0.0005

*Note : All specifications can be designed according to customer demand.