Hiwin Dual Axis Customization - DLH

Hiwin Dual Axis Customization - DLH : Automation equipment, plasma repair equipment, electron beam scanning applications.

Stage Dual Axis Customization - DLH

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Feature | Stage Dual Axis Customization - DLH

• Suitable for vacuum environment, 1 x 10^-6 Torr.
• Vacuum flat cable.
• Integration of high-precision torque motor.
• X-Y positioning with high precision angular compensation.
• Can be equipped with ironless or ironcore motor.

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Dimensions | Stage Dual Axis Customization - DLH

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Specifications | Dual Axis Customization - DLH

Stage type	LMX2C-S23S27-360-240+TMS32
Motor Type	Ironcore(/Ironless) motor
Stroke(mm)	X-axis : 240, Y-axis : 360
Peak Force(N) / Continuous Force(N)	X-axis : 1014/382, Y-axis : 639/240
Repeatability(µm)	X-axis : ±2, Y-axis : ±1 (with HIWIN solution)
Accuracy(µm)	X-axis : ±5, Y-axis : ±3 (after error mapping)
Max. Acceleration(m/s2)	X-axis : 5, Y-axis : 5(with payload)
Max. Velocity(m/s)	X-axis : 0.7, Y-axis : 1(with payload)
Payload(kg)	5
Stage orientation	Horizontal
Torque Motor Type	TMS32
Peak Torque(Nm) / Cotinuous Torque(Nm)	30/10
Max. Velocity(rpm)	700(220V)
Repeatability(arc-sec)	±3
Accuracy(are-sec)	±45
Inertia of rotation parts(kgm2)	0.014

*Note : All specifications can be designed according to customer demand.