Hiwin Gantry Structure Customization - ALA

Hiwin Gantry Structure Customization - ALA : Glass substrate exposure Application, white testing equipment, wafer defact detection equipment.

Stage Gantry Structure Customization - ALA

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Feature | Stage Gantry Structure Customization - ALA

• Using non-contact air bearing.
• Without main tenance.
• High positioning accuracy.
• Not easily influenced by environmental temperature.
• With high-precision and large-size vacuum chuck.
• With passive vibrations suppressing system.
• Integrated electronic control system.
• Equipped with ironless motor.

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Dimensions | Stage Gantry Structure Customization - ALA

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Specifications | Stage Gantry Structure Customization - ALA

Stage type	LMX2C-CB4CB7-50-50+TMS03
Motor Type	Ironless motor
Stroke(mm)	X-axis :700, Y-axis : 800, Z-axis : 50
Peak Force(N) / Continuous Force(N)	X-axis : 580/145, Y-axis : 780/195, Z-axis : HIWIN 1KW(220V)
Repeatability(µm)	X-axis : ±0.5, Y-axis : ±0.5, Z-axis : ±2 (with HIWIN solution)
Accuracy(µm)	X-axis : ±1.5, Y-axis : ±1.5, Z-axis : ±4 (after error mapping)
Max. Acceleration(m/s2)	X-axis : 2.5, Y-axis : 4(with payload 10kg), Z-axis : 2 (with payload 200 kg)
Max. Velocity(m/s)	X-axis : 0.3, Y-axis : 0.3(with payload 10kg), Z-axis : 2 (with payload 200 kg)
Vertical Straightness(µm)	X-axis : ±2, Y-axis : ±2, Z-axis : ±10
Horizontal Straightness(µm)	X-axis : ±1, Y-axis : ±1, Z-axis : ±2
Orthogonality(arc-sec)	XY-axis : ±5
Payload(kg)	XY-axis : 10, Z-axis : 200
Stage orientation	Horizontal

Note : All specifications can be designed according to customer demand.