Hiwin Multi-axes Customization - MLA

Hiwin Multi-axes Customization - MLA : Wafer cutting, the glass substrate testing equipment, wafer bonding.

Stage Multi-axes Customization - MLA

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Multi-axes Customization - MLA
Hiwin Multi-axes Customization - MLA

Feature | Stage Multi-axes Customization - MLA

  • Integration of high-precision TMN torque motor.
  • With excellent flatness (X-Yxtheta 0.01 mm).
  • Water cooling design, reduce thermal deformation.
  • XY Stage low center of gravity design.
  • Can be equipment with iron less or ironcore motor.

Dimensions | Stage Multi-axes Customization - MLA

Hiwin Multi-axes Customization - MLA


Specifications | Stage Multi-axes Customization - MLA

Stage typeLMX2C-F23F43-300-300+BS-5-170+TMN93EH
Motor Type Ironcore (/Ironless) motor & HIWIN AC Servo motor
Stroke(mm) X-axis : 362, Y-axis : 390
Peak Force(N)/Continuous Force(N) X-axis : 2082/764, Y-axis : 5496/2252
Repeatability(µm) ±0.5(with HIWIN solution)
Accuracy(µm) ±1(after error mapping)
Max. Acceleration(m/s2) 10(with payload)
Max. Velocity(m/s) 1(with payload)
Payload(kg) Z-axis : 50, A-axis : 30
Stage orientation Horizontal
Torque Motor Type TMN93EH
Peak Torque(NM)/Continuous Torque(Nm) 45/15
Max. Velocity(rpm) 300(220V)
Repeatability(arc-sec) ±2.5
Accuracy(arc-sec) ±25
Inertia of rotation parts(kgm2) 0.052

Note : All specifications can be designed according to customer demand.

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