SMC - Thermo-Chillers (Circulating Fluid Temperature Controllers)
Thermo-Chillers (Circulating Fluid Temperature Controllers)
มีทั้งหมด 16 รุ่น คือ
- Thermo-chiller / Standard Type HRS
- Thermo-chiller / Environmentally Resistant Type HRS-R
- Thermo-chiller / Standard Type HRS090
- Thermo-chiller / Standard Type HRS100/150
- Thermo-chiller / Standard Type HRS200
- Thermo-chiller / Inverter Type HRSH090
- 5-Port Solenoid Valve/Plug-in Type SY3000/5000/7000
- Vacuum Release Valve with Restrictor SY3A□R SY5A□R
- 5-Port Solenoid Valve SY3000/5000/7000/9000
- 5-Port Solenoid Valve/Plug-in Type S0700
- 5-Port Solenoid Valve/Plug Lead Type S0700
- 5-Port Solenoid Valve SV1000/2000/3000/4000
- 4/5-Port Solenoid Valve SYJ3000/5000/7000
- 5-Port Solenoid Valve/Cassette Type Manifold SZ3000
- 5-Port Solenoid Valve VF1000/3000/5000
- Large Size 5-Port Solenoid Valve VP4□50/4□70
1) Thermo-chiller / Standard Type HRS
Features | Thermo-chiller / Standard Type HRS
- With this chiller, cooling water can be obtained anywhere it is necessary because of easy installation and easy operation.
- For a wide range of applications, such as laser machine tools, analytical equipment, LCD manufacturing equipment, mold temperature control, etc.
- Compact: W 377 x H 615 x D 500 mm, 40 kg (HRS012 / 018 / 024)
- Timer function, Low liquid level protection, Power failure auto-restart, Anti-freezing function, etc.
- Self diagnosis function
- Ideal for overseas models (Single-phase 200 to 230 VAC, Single-phase 100, 115 VAC)
- Compliant with UL Standards, CE-marking
Specifications | Thermo-chiller / Standard Type HRS
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS012 to 060 | 5 to 40 ℃ | 1.3 kW 1.9 kW 2.4 kW 3.2 kW 4.2 kW 5.1 kW 5.9 kW (60 Hz) |
±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution (15％) |
2) Thermo-chiller / Environmentally Resistant Type HRS-R
Features | Thermo-chiller / Environmentally Resistant Type HRS-R
- Resistant to dust and water splashing
- Protection of the electrical unit: IP54
- Metal panel The entire exterior surface is metal. A stainless steel panel can be selected. (Option)
- A large capacity tank (12 L) is available. (Option)
- Ambient temperature: 5 to 45°C
Specifications | Thermo-chiller / Environmentally Resistant Type HRS-R
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS-R | 5 to 40℃ | 1.9 kW 2.9 kW 5 kW (60 Hz) |
±0.1℃ | Air-cooled refrigeration | Tap water Ethylene glycol aqueous solution (15%) |
3) Thermo-chiller / Standard Type HRS090
Features | Thermo-chiller / Standard Type HRS090
- Lightweight and compact
- Cooling capacity: 9 kW
- Temperature stability: ±0.5°C
- Set temperature range: 5 to 35°C
- Max. ambient temperature: 45°C
- Power supply: 3-phase 200 to 230 VAC, 380 to 415 VAC, 460 to 480VAC
Specifications | Thermo-chiller / Standard Type HRS090
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS090 | 5 to 35℃ | 9kW (60Hz) |
±0.5℃ | Air-cooled refrigeration Water-cooled refrigeration |
Tap water Deionized water Ethylene glycol aqueous solution (15％) |
4) Thermo-chiller / Standard Type HRS100/150
Features | Thermo-chiller / Standard Type HRS100/150
- No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
- Compatible with power supplies in Europe, Asia, Oceania, North, Central, and South America
- Low-noise design: 70 dB (A)
- Outdoor installation: IPX4
- Compact, Space saving
Specifications | Thermo-chiller / Standard Type HRS100/150
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS100 HRS150 |
5 to 35℃ | 9.5 kW 14.5 kW (60 Hz) |
±1.0℃ | Air-cooled refrigeration Water-cooled refrigeration |
Tap water Deionized water Ethylene glycol aqueous solution (15%) |
5) Thermo-chiller / Standard Type HRS200
Features | Thermo-chiller / Standard Type HRS200
- 3-phase 380 to 415 VAC (50 Hz), 3-phase 460 to 480 VAC (60 Hz)
- No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
- Outdoor installation: IPX4
- Compact, Space saving
Specifications | Thermo-chiller / Standard Type HRS200
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS200 | 5 to 35℃ | 20.5 kW | ±1.0℃ | Air-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution (15%) |
6) Thermo-chiller / Inverter Type HRSH090
Features | Thermo-chiller / Inverter Type HRSH090
- Power consumption reduced by 53% Complete with energy-saving triple inverter!
- Cooling capacity: 9.5 kW (Air-cooled), 11.0 kW (Water-cooled)
- Temperature stability: ±0.1°C
- Set temperature range: 5°C to 40°C
Specifications | Thermo-chiller / Inverter Type HRSH090
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRSH090 | 5 to 40℃ | 9.5 kW | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration |
Tap water Deionized water Ethylene glycol aqueous solution (15%) |
7) Thermo-chiller / Inverter Type HRSH
Features | Thermo-chiller / Inverter Type HRSH
- Complete with energy-saving triple inverter!
- Outdoor installation, Splashproof type (IPX4)
- Max. ambient temperature: 45℃
- Min. ambient temperature: -20℃ (For the air-cooled type)
- Temperature stability: ±0.1℃ (When a load is stable)
- Space saving and lightweight: 280 kg (25 kW type)
- Compliant with UL Standards, CE-marking
Specifications | Thermo-chiller / Inverter Type HRSH
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRSH | 5 to 35℃ | 10 kW 15 kW 20 kW 25 kW 28 kW |
±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration |
Tap water Deionized water Ethylene glycol aqueous solution (15%) |
8) Thermo-chiller / Basic Type HRSE
Features | Thermo-chiller / Basic Type HRSE
- Complete with energy-saving triple control Reduces power consumption by 33%
- Compact and lightweight: 32 kg (100 VAC)
- Maintenance-free: Magnet pump
- Low-noise design: 55 dB (A)
Specifications | Thermo-chiller / Basic Type HRSE
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRSE | 10 to 30℃ | 1.2 kW 1.6 kW 2.2 kW (60 Hz) |
±2.0℃ | Air-cooled refrigeration | Tap water Ethylene glycol aqueous solution (15%) |
9) Thermo-chiller / Dual Channel Refrigerated Thermo-chiller for Lasers HRL
Features | Thermo-chiller / Dual Channel Refrigerated Thermo-chiller for Lasers HRL
- Temperatures for 2 fluid channel systems can be controlled individually by one chiller.
- Space saving, Reduced wiring Footprint: 22% reduction One power supply system for 2 channels
- Energy saving Power consumption reduced by 30%
- Touch panel
- Power supply: 3-phase 380 to 415 VAC (50/60 Hz) 3-phase 460 to 480 VAC (60 Hz)
Specifications | Thermo-chiller / Dual Channel Refrigerated Thermo-chiller for Lasers HRL
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRL100 HRL200 HRL300 |
CH1: 15 to 25℃ CH2: 20 to 40℃ | CH1: 9 kw, 19 kW, 26 kW CH2: 1.0 kW (Max. 1.5 kW) | CH1: ±0.1 CH2: ±0.5 |
Air-cooled refrigeration | CH1: Tap water CH2: Tap water, Deionized water |
10) Thermo-chiller Compact Dual/Basic Type for Lasers HRLE
Features | Thermo-chiller Compact Dual/Basic Type for Lasers HRLE
- The temperatures of 2 fluid channel systems can be controlled individually by 1 chiller.
- Space saving, Reduced wiring Footprint reduced by 21% One power supply system for 2 channels
- Energy saving Power consumption reduced by 17%
Specifications | Thermo-chiller Compact Dual/Basic Type for Lasers HRLE
| Series | Set temperature range | Cooling capacity (CH1, 2 total) | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRLE090 | CH1: 15 to 25℃ CH2: CH1 + 0 to 15℃ |
8.0 kW / 9.5 kW (50 Hz / 60 Hz) | CH1: ±0.1 CH2: ±0.5 |
Air-cooled refrigeration | CH1: Tap water CH2: Tap water, Deionized water |
11) Thermo-chiller / Rack Mount Type HRR
Features | Thermo-chiller / Rack Mount Type HRR
- Operable without the need to remove the unit from the rack Front access: Simple to control, service, and maintain with all filters and drainage accessible via the front panel
- Space saving: Multiple chillers can be mounted to a 19-inch rack.
- Cooling capacity: 1.1/1.2/1.8/2.4/3.0/5.1 kW (60 Hz)
- Temperature stability: ±0.1℃
- Global power supply:
- Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz)
- Single-phase 200 to 230 VAC (50/60 Hz)
Specifications | Thermo-chiller / Rack Mount Type HRR
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRR | 5 to 35℃ 15 to 35℃ |
1.1 kW 1.2 kW 1.8 kW 2.4 kW 3.0 kW 5.1 kW |
±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration |
Tap water Ethylene glycol aqueous solution (15%) |
12) EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F
Features | EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F
- More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump.
- Energy saving
- The inverter controls the number of motor rotations of the compressor and pump according to the load from the user’s application.
- Power consumption: Max. 65% reduction
- Facility water: Max. 67% reduction
- High performance
- Temperature stability: ±0.1°C (When a load is stable)
- Cooling time: Max. 46% reduction (SMC comparison)
- Refrigerant: R410A (HFC) / R448A (HFC/HFO)
Specifications | EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ-F | -20 to 40℃ 10 to 60℃ -20 to 90℃ |
2 kW, 4 kW, 8 kW, 10 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated fluids Ethylene glycol aqueous solution Tap water/Deionized water |
13) Thermo-chiller / High-performance Type HRZ
Features | Thermo-chiller / High-performance Type HRZ
- Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
- Compliant with various safety standards
- Compliant with UL Standards, SEMI Standards, CE-marking
- * The HRZ series will be remodeled in December 2021. Please select the HRZ-F series.
Specifications | Thermo-chiller / High-performance Type HRZ
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ |
1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
14) Thermo-chiller / High-performance Inverter Type HRZ
Features | Thermo-chiller / High-performance Inverter Type HRZ
- In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
- A wide temperature range and cooling capacity range are covered by one unit.
- Suited to the short innovation cycle of semiconductor equipment, Capable of responding flexibly to changes in the process conditions
- Compliant with UL Standards, SEMI Standards, CE-marking
- * The HRZ series will be remodeled in December 2021. Please select the HRZ-F series.
Specifications | Thermo-chiller / High-performance Inverter Type HRZ
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 90℃ 10 to 60℃ |
10 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
15) Dual Thermo-chiller / High-performance Inverter Type HRZD
Features | Dual Thermo-chiller / High-performance Inverter Type HRZD
- Temperatures for 2 systems can be controlled separately by one chiller.
- Double inverter type: Substantially more energy is saved by using a DC inverte refrigerator and inverter pump.
- Space saving: Footprint reduced by 23%
- Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system
- Compliant with SEMI Standards, CE-marking
Specifications | Dual Thermo-chiller / High-performance Inverter Type HRZD
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZD | -30 to 90℃ | 9.5 kW x 2 | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Ethylene glycol aqueous solution (60%) |
16) Water-cooled Thermo-chiller / High-performance Type HRW
Features | Water-cooled Thermo-chiller / High-performance Type HRW
- Direct heat exchanger for in-plant circulating fluid
- Can control the temperature over a wide range since a compressor is not required.
- Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
- Compliant with UL Standards, SEMI Standards, CE-marking
- It is possible to select the inverter type.
Specifications | Water-cooled Thermo-chiller / High-performance Type HRW
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRW | 20 to 90℃ | 2 kW, 8 kW, 15 kW, 30 kW | ±0.3℃ | Water-cooled type (Without compressor) |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
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