SMC - Process Gas Equipment

Process Gas Equipmen

มีทั้งหมด 7 รุ่น คือ

Series	Type	Application	Body material	Connection type	Connection size
AP/SL	Single stage	Distribution (Compact)	316L SS secondary remelt	Face seal Tube weld	1/4", 3/8
AP/SL	Single stage	Distribution	316L SS secondary remelt	Face seal Tube weld	1/4", 3/8" 1/2", 3/4"
AP/SL	Single stage	Bulk gas	316L SS	Face seal Tube weld	1/2", 3/4", 1"
AP/SL	Single stage	Source	316L SS secondary remelt	Face seal Tube weld	1/4", 3/8" 1/2", 3/4"
AP/SL	Single stage	Sub-atmospheric pressure	316L SS secondary remelt	Face seal Tube weld	1/4", 3/8" 1/2", 3/4"
AP	Two stage	Source	316L SS secondary remelt	Face seal Tube weld	1/4", 3/8"
AZ	Single stage	Distribution	316L SS	Face seal Tube weld	1/4", 3/8" 1/2"
AZ	Single stage	Source	316L SS	Face seal Tube weld	1/4", 3/8" 1/2"
AZ	Single stag	Sub-atmospheric pressure	316L SS	Face seal Tube weld	1/4", 3/8" 1/2"

Series	Type	Application	Body material	Connection type	Connection size
AK	Single stage	Distribution	316 SS or Brass	NPT female, Compression	1/4", 3/8" 1/2"
AK	Single stage	Source	316 SS or Brass	NPT female, Compression	1/4", 3/8" 1/2"
AK	Single stage	Sub-atmospheric pressure	316 SS or Brass	NPT female, Compression	1/4", 3/8" 1/2"
AK	Two stage	Source	316 SS or Brass	NPT female, Compression	1/4"
BP	Back pressure regulator	-	316 SS or Brass	NPT female, Compression	1/4"

For UHP gas delivery in semiconductor and other clean industries
Used as a gas shutoff valve
No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.

Series	Type	Body material	Connection type	Connection size
AP	Air operated type	316L SS secondary remelt	Face seal Tube weld	1/4", 3/8" 1/2", 3/4"
AP	Manually operated	316L SS secondary remelt	Face seal Tube weld	1/4", 3/8" 1/2", 3/4"

Series	Type	Body materia	Connection type	Connection size
AZ	Air operated type	316L SS	Face seal Tube weld	1/4", 3/8", 1/2"
AZ	Manually operated	316L SS	Face seal Tube weld	1/4", 3/8", 1/2"

Check valve
- Fluid backflow is prevented by back pressure.
- Unique design with only one moving part in the gas stream, an O-ring
- Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side
Vacuum generator
- Vacuum generation equipment
- Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement
Flow switch
- Detects excess flow above a given flow rate caused by pipe breakage, etc.

Series	Type	Body materia	Connection type	Connection size
AP	Check valve	316L SS secondary remelt	Face seal Tube weld	1/4", 3/8"
AP	Vacuum generator	316L SS	Face seal Tube weld	1/4", 3/8"
AP	Flow switch	316L SS secondary remelt 316L SS	Face seal Tube weld	1/2". 3/4"

Rc, R, and NPT connections have been added to the series.
For a wide variety of applications from semiconductor to general
Cleaned for O2 service
Compact and lightweight due to the shortening of the actuator (AK3542/4542)
M5 actuation port (AK3542/4542)
Compact and lightweight due to the modifying of the knob design (AK3652/4652)
The knob features a unique design that combines a scalloped round knob with a raised rectangular section to provide two choices of gripping. (AK3652/4652)

Series	Type	Body materia	Connection type	Connection size
AK	Air operated type	316 SS	Compression Rc, R, NPT	1/4"，3/8"
AK	Manually operated	316 SS	Compression Rc, R, NPT	1/4"，3/8"

For a wide variety of applications from Semiconductor to general
Compact and lightweight
- Weight: 0.52 kg
- Height: 97.5 mm
MInimum dead leg construction
Various piping configurations are availble
- Select from compression, NPT female, or Rc thread.