SMC - High Vacuum Valves

Features | Aluminum High Vacuum Angle Valve XLA / C / F / G

• Aluminum bodied Uniform baking temperature Lightweight, Compact Minimal outgassing Minimal contamination from heavy metals
• Bellows are replaceable.

Features | Aluminum High Vacuum Angle Valve XLA / C-100 / 160(-1)-X152

• Improved durability of bellows (Flange sizes 100 and 160)
• Service life of two million cycles
• Space required for equipment can be reduced Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa) Increased flexibility of mounting orientation
• Lightweight, Compact

Features | Aluminum High Vacuum Angle Valve XL☐

• High fluorine resistance
• Minimal outgassing
• Minimal contamination from heavy metals

*The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been remodeled in September 2017. Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.

Features | Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ

• One-touch connection and release (No tools are required.)

Features | Stainless Steel High Vacuum Angle/In-line Valve XM / XY

• The precision casting, unified composition prevents the accumulation of gas.
• The XM series is interchangeable with the XL series aluminum high vacuum angle valve.

Note : Size 16 is not available for the in-line type.

Features | Normal Close High Vacuum Solenoid Valve XSA

• Minimum operating pressure: 1 × 10-6 Pa (abs)
• Leakage: Internal 1.3 × 10-9 Pa•m³/s, External 1.3 × 10-11 Pa•m³/s
• 2 types of fittings and female threads are available.
• Power consumption: Max. 25% reduction
• Weight: Max. 18% lighter (0.5 kg → 0.41 kg)

Features | Smooth Vent Valve XVD

• The valve / needle valve-integrated construction requires only 1/4 the piping space of previous models.
• Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion.
• Flow of both the initial air supply and the main air supply can be adjusted.