Hiwin Air bearing stage - LMAS

Hiwin Air bearing stage - LMAS : Nano accuracy positioning stage developed for semiconductor/FPD industries and features air bearing of new generation.

Air bearing stage - LMAS

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Feature | Air bearing stage - LMAS

Hiwin Air bearing stage - LMAS : It is leading by using vacuum preloaded air bearing with low consumption, dynamic counter balancing technology and mass compensation algorithm, which enable accurate motion in a thousandth second, decreasing production takt time. Futher-more, friction is eliminated so that equipment reliability is increased.

• Non-contact air bearing provide better positioning accuracy
• Embedded magnetic preloading design, enhance stability
• Provideextremely smooth motion and rapid setting time
• Equipped with ironless linear motor, no cogging
• High resolution feedback with linear motor, no cogging
• high resolution feedback with linear optical encoder
• Equipped with high flexi ble cable
• For clean room, no need to lubricate and easy to maintain
• Low velocity ripple
• Available for precision positioning, calibraion systems, scanning applications, wafer inspection

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Dimensions | Air bearing stage - LMAS

Type	Stroke	Dimensions
		A	B	C	D	N
AS200	200	280	-	526	619	2
AS400	400	480	-	726	819	2
AS600	600	580	-	926	1019	2
AS800	800	440	880	1126	1219	4
AS1000	1000	540	1080	1326	1419	4

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Specifications | Air bearing stage - LMAS

Specifications	Unit	AS200	AS400	AS600	AS800	AS1000
Stroke	mm	200	400	600	800	1000
Motor type	-	LMCB8
Bus voltage	V	Up to 325 VDC
Instant current	A(pk)	6
Continuous current	A(rms)	2.0
Feedback system	-	Optical Linear Encoder : Analog period 20µm
Resolution*1	µm	4
Repeatability	µm	±0.3	±0.4	±0.4	±0.5	±0.5
Positioning accuracy*2	µm	±3.0	±4.0	±4.0	±5.0	±5.0
Horizontal straightness*3	µm	±1.0	±1.0	±1.5	±2.0	±2.5
Vertical straightness*3	µm	±1.0	±1.0	±1.5	±2.0	±2.5
Pitch*3	arc-sec	±2.0	±2.5	±3	±3.5	±4
Yaw*3	arc-sec	±2.0	±2.5	±3	±3.5	±4
Roll*3	arc-sec	TBD
Allowable payload	kg	10
Max. speed*4*5	m/s	1	1.2	1.4	1.6	2
Max. acceleration*5	m/s2	10	11	12	13	14
Working pressure*6	N/m2	4x105 N/m2 ± 2x104 N/m2
Moving unit mass*7	kg	8
Moving unit material	-	Alumimum (hardned anodized)
Base	-	Granite

Note :

1. The maximum resolution is up to 4096 times, resolution accuracy is about 4 nm
2. Absolute accuracy is after error mapping.
3. Required specification is restricted by load, this specification is based on empty load
4. Must comply with the resolution of encoder and number of mass transfer rate
5.  Based on the limitations of motor instantly force, only allow moving unit mass about 8kg (center load)
6. It is recommended to link pressure switch on the emergency stop devices to protect air bearing from overloading
7. Free of load